Experimental Ion Beam Etching Equipment×アールエムテック - メーカー・企業と製品の一覧

[Demo in Progress!] Small Experimental Ion Beam Etching Device

[Demo in progress!] Experimental device equipped with an ion source that can be customized to meet usage needs.

The "Small Experimental Ion Beam Etching Device" uses a DC ion source and is equipped with a substrate rotation cooling single stage. It easily etches materials such as Au, Pt, and magnetic materials, and taper processing can also be done easily. Processing is possible at a substrate surface temperature of 80°C or lower. It is ideal for microfabrication. 【Features】 ● No toxic gases are used, so exhaust gas treatment is unnecessary ● Endpoint detector can be installed ● For inquiries or questions about ion beam etching devices, ion sources, and ion beam technology, please feel free to consult us. For more details, please download the catalog or contact us.

• 企業：アールエムテック
• 価格：Other

• Etching Equipment